WebSep 1, 2003 · Optical proximity correction can counteract many of the imaging effects that now distort patterns on the wafer. One typical effect is a variation in the dimensions of identical features depending ... WebOptical proximity correction (OPC) is regarded as one of the most important computational lithography approaches to improve the imaging performance of sub-wavelength …
Optical proximity correction - Wikipedia
WebDec 29, 2024 · The problem of optical proximity correction (OPC) in modern microelectronics can be solved using various methods, depending on the level of the technology being implemented. In the most general form, these methods are divided into rule-based correction and simulation-based correction . To implement technology at 130 … WebApr 27, 2016 · Optical Proximity Correction (OPC) is still the main stream among Resolution Enhancement Techniques (RETs) for printing advanced technology nodes in optical lithography in the foreseeable future. However, to keep pace with the continuous shrinkage of feature dimensions, OPC algorithms are getting more aggressive to achieve acceptable … lithonia ls4ar
Fast optical proximity correction based on graph convolution …
WebRecurrent neural network (RNN) is employed as a machine learning model for fast optical proximity correction (OPC). RNN consists of a number of neural network i Optical … WebMar 15, 2024 · In this paper, we propose a methodology in model calibration and recipe setup and will provide recommendation on the effective use of optical proximity correction. Published in: 2024 China Semiconductor Technology International Conference (CSTIC) Article #: Date of Conference: 14-15 March 2024 Date Added to IEEE Xplore: 29 June 2024 WebApr 13, 2024 · Optical proximity correction (OPC) is a critical step in semiconductor manufacturing due to its high complexity and significant influence on the subsequent process steps. lithonia lrt10